Method of and an apparatus for measuring surface contour
US5467289A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 1993 |
| Grant date | Nov 14, 1995 |
| Priority date | — |
| Expiry date | Oct 12, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement-datum similar to profile of a measuring object set in a measuring area in which a detector and the measuring object are moved relatively is formed to measure the displacement value between the detector and the measuring object through the relative movement based on the measurement-datum to thereby compute the surface contour of the measuring object from the measured data with reference to the measurement-datum. Since the measurement-datum is set in the spatial area, a precise mechanical processing will not be required for an accurate measurement of the measuring object having a strange profile which was not measured by conventional apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.