Integrated circuit test system
US5469072A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 1993 |
| Grant date | Nov 21, 1995 |
| Priority date | — |
| Expiry date | Nov 1, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0735
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated circuit test system provides a quick change flexible circuit membrane (214). The flexible circuit membrane is a quadrant based design which allows steep launch angles away from a rectangular die under test (112). The flexible circuit membrane is edge guided (308,309) for positioning and concentric alignment in a probe tooling fixture (212). The system may include a focusing force member (528) focusing force only at the test point locations in line with the die pad contact positions (512) which allows greater force to be concentrated on the contact area, and helps to alleviate the debris tracking or "dust mop" effect. Additionally, a relieved area (620) may be provided on the pressure applicator (616) to prevent membrane droop or the pillowing effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.