Method of making zinc-based transparent conductive film
US5470618A · kind A · utility
5Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1994 |
| Grant date | Nov 28, 1995 |
| Priority date | — |
| Expiry date | Jul 14, 2014 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/086
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A zinc oxide-based transparent conductive film containing of gallium or indium and having a resistivity of not more than 10.sup.-3 .OMEGA..cm is provided by evaporating a source of zinc oxide containing 0.5 to 5% by weight of gallium oxide or 0.3 to 4.5% by weight of indium oxide and depositing same onto a substrate after activating the vapor of the source by a plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.