Dual-modulation interferometric ellipsometer
US5485271A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1995 |
| Grant date | Jan 16, 1996 |
| Priority date | — |
| Expiry date | Apr 6, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an infrared ellipsometer intended to take measurements of a sample (1). An exciter group (3) of the ellipsometer includes a source (101), a Michelson interferometer (103), a polarizer (105), and an optical device (107) to align the source (101) and the sample (1). An analysis group (7) has a polarizer-analyzer (701), a detector (703), and an optical device (705) for aligning the sample (1) and the detector (703). This infrared ellipsometer also incorporates a phase modulator (8). An electronic devices (9) controls the modulator (8) and the Michelson interferometer (103), and receives the signal produced by the detector (703).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.