Sputtering targets having life alarm function
US5487823A · kind A · utility
16Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 1994 |
| Grant date | Jan 30, 1996 |
| Priority date | — |
| Expiry date | Apr 26, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sputtering target is provided in which a gas component source (material capable of evolving gas) is included in the bottom portion of the target. Predicting and determining the expiration of the useful life of sputtering targets is permitted more precisely and in a simpler way than heretofore described. Moreover over-sputtering is prevented with an improvement in target use efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.