Junichi Anan
6Patents
6h-index
15Co-inventors
52Inventor score
Filing activity: Jun 8, 1990 → Apr 17, 1995
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5135629A | Thin film deposition system | Electricity | 66 | Expired |
| US5460793A | Silicide targets for sputtering and method of manufacturing the same | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5464520A | Silicide targets for sputtering and method of manufacturing the same | Electricity | 24 | Expired |
| US5804046A | Thin-film forming apparatus | Electricity | 23 | Expired |
| US5618397A | Silicide targets for sputtering | Emerging Cross-Sectional Technologies | 21 | Expired |
| US5487823A | Sputtering targets having life alarm function | Electricity | 16 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.