Patent · US Expired

Integrated accelerometer with a sensitive axis parallel to the substrate

US5495761A · kind A · utility

46Cited by

3References

9Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Bernard Diem · Échirolles, FR
France Michel · Saint-Égrève, FR

Key dates

Filing date	Dec 22, 1993
Grant date	Mar 5, 1996
Priority date	—
Expiry date	Dec 22, 2013

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An accelerometer with a mobile mass mechanically connected, via an insulator, to a conductive substrate by flexible beams. Mobile conductive teeth are integrally formed with the mobile mass. Fixed conductive teeth are joined to an insulator from the substrate and arranged in an alternating manner with the mobile conductive teeth. Fixed electrodes serving as an electrostatic screen are placed between the fixed teeth and the mobile teeth in such a way that each mobile tooth is intercalated between a fixed electrode and a fixed tooth so as to constitute a series of variable capacitance capacitors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.