Inventor · Échirolles, FR

Bernard Diem

33Patents
12h-index
33Co-inventors
81Inventor score

Filing activity: Oct 10, 1984 → Dec 18, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US5576250A Process for the production of accelerometers using silicon on insulator technology Emerging Cross-Sectional Technologies 77 Expired
US5510276A Process for producing a pressure transducer using silicon-on-insulator technology Emerging Cross-Sectional Technologies 64 Expired
US5965968A Electrostatic motor Electricity 48 Expired
US5495761A Integrated accelerometer with a sensitive axis parallel to the substrate Physics 46 Expired
US5912499A Pressure transducer comprising a sealed transducer with a rigid diaphragm Emerging Cross-Sectional Technologies 39 Expired
US5780885A Accelerometers using silicon on insulator technology Emerging Cross-Sectional Technologies 30 Expired
US4715930A Process for producing by sloping etching a thin film transistor with a self-aligned gate with respect to the drain and source thereof Emerging Cross-Sectional Technologies 25 Expired
US4950058A Active matrix color display screen without crossing of address line conductors and command column conductors Physics 19 Expired
US6546801B2 Micro-machined mechanical structure and device incorporating the structure Physics 17 Expired
US4587720A Process for the manufacture of a self-aligned thin-film transistor Emerging Cross-Sectional Technologies 14 Expired
US6001666A Manufacturing process of strain gauge sensor using the piezoresistive effect Emerging Cross-Sectional Technologies 14 Expired
US7906439B2 Method of fabricating a MEMS/NEMS electromechanical component Emerging Cross-Sectional Technologies 12 Active
US8011244B2 Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses Physics 6 Active
US7232701B2 Microelectromechanical (MEM) device with a protective cap that functions as a motion stop Physics 5 Expired
US7572053B2 Tightness test for MEMS or for small encapsulated components Physics 4 Expired
US9528895B2 Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor Physics 4 Active
US7631558B2 Microsystem, more particularly microgyrometer, with capacitive electrode detection element Physics 4 Active
US7993949B2 Heterogeneous substrate including a sacrificial layer, and a method of fabricating it Performing Operations; Transporting 3 Active
US9511991B2 Encapsulation structure including a mechanically reinforced cap and with a getter effect Electricity 3 Active
US8349660B2 Cavity closure process for at least one microelectronic device Electricity 3 Active
US9187320B2 Method for etching a complex pattern Performing Operations; Transporting 2 Active
US7790615B2 Electronic component packaging Performing Operations; Transporting 1 Active
US9448070B2 Gyrometer with reduced parasitic capacitances Physics 1 Active
US7700457B2 Method and zone for sealing between two microstructure substrates Performing Operations; Transporting 1 Expired
US10126333B2 Multisensory detector Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.