Positive-acting radiation-sensitive mixture and recording material produced therewith

US5498506A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Horst Wengenroth · Westerburg, DE
• Horst Roeschert · Ober-Hilbersheim, DE
• Walter Spiess · Dieburg, DE
• Gerhard Buhr · Königstein, DE
• Georg Pawlowski · Saitama, JP

Key dates

• Filing date: Jan 9, 1995
• Grant date: Mar 12, 1996
• Expiry date: Jan 9, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/039
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to a radiation-sensitive mixture comprising a) a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, b) a compound which forms an acid under the action of actinic radiation and c) a compound which contains at least one C-O-C or C-O-Si bond which can be cleaved by an acid, wherein said mixture additionally contains 0.1 to 70 mol %, based on the maximum amount of acid which can theoretically be produced from the compound b), of at least one compound having at least one nitrogen atom in an amine or amide bond. The mixture is used in particular in the production of electronic components. The invention also relates to a recording material having a substrate and a radiation-sensitive coating.