Process for making electronic device
US5499668A · kind A · utility
26Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1994 |
| Grant date | Mar 19, 1996 |
| Priority date | — |
| Expiry date | Oct 27, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/166
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Oxide films, and residues of organic matters, carbons, if any, are removed from a metal surface simply without using complicated steps and without giving adverse effects on electronic parts or electronic devices by irradiating the metal surface with a laser beam of lower energy level than energy capable of changing the metal surface structure, thereby cleaning the metal surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.