Photoelectric position measuring system with integral optical circuit having phase shifted interference gratings
US5500734A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 1994 |
| Grant date | Mar 19, 1996 |
| Priority date | — |
| Expiry date | May 19, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated optical interferometer is provided having a substrate located on one object and a measuring reflector or measuring diffraction grating located on another object. A beam impinging upon the substrate is split into two partial beams by a coupling grating and is coupled into a beam waveguide and supplied to another coupling grating. A second partial beam is routed by the measuring reflector to the second coupling grating and there interferes with the first partial beam. The second coupling grating is divided into a plurality of gratings which are phase-shifted with respect to each other so that signals that are phase-shifted with respect to each other can be generated by a plurality of detectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.