Liquid indium source
US5502227A · kind A · utility
7Cited by
1References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1993 |
| Grant date | Mar 26, 1996 |
| Priority date | — |
| Expiry date | Jul 27, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4482
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A uniform dosimetry of vapor phase trimethylindium is provided by dissolving trimethylindium in a C.sub.3 -C.sub.5 trialkylindium and bubbling an inert carrier gas through the solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.