Patent · US Expired

Power MOSFET in silicon carbide

US5506421A · kind A · utility

194Cited by
27References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 24, 1992
Grant dateApr 9, 1996
Priority date
Expiry dateNov 24, 2012

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8325

Abstract

The power metal oxide semiconductor field effect transistor (MOSFET) has a drain region, a channel region, and a source region formed of silicon carbide. The drain region has a substrate of silicon carbide of a first conductivity type and a drain-drift region of silicon carbide adjacent the substrate having the same conductivity type. The channel region is adjacent the drain-drift region and has the opposite conductivity type from the drain-drift region. The source region is adjacent the channel region and has the same conductivity type as the drain-drift region. The MOSFET also has a gate region having a gate electrode formed on a first portion of the source region, a first portion of the channel region, and a first portion of the drain region. A source electrode is formed on a second portion of the source region and a second portion of the channel region. Also, a drain electrode is formed on a second portion of the drain region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.