Patent · US Expired

Pressure sensor

US5507186A · kind A · utility

2Cited by

1References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Kurt Weiblen · Metzingen, DE
Werner Herden · Gerlingen, DE
Uwe Lipphardt · Reutlingen, DE
Horst Muenzel · Reutlingen, DE
Matthias Kuesell · Kornwestheim, DE
Steffen Schmidt · Dresden, DE

Key dates

Filing date	Jun 16, 1994
Grant date	Apr 16, 1996
Priority date	—
Expiry date	Jun 16, 2014

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0052
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a pressure sensor, a force is transferred via a pressure plunger end made of relatively hard material onto a measurement element including a sensor membrane on a support. The sensor membrane is part of a micromechanical arrangement made of silicon. A metal structure made of a metal of lower hardness compared with the hardness of the material of the pressure plunger end is applied onto the sensor membrane. This metal structure can be impressed and plastically deformed with increased force by the contact surface of the pressure plunger end, in such a way that conforming contact of the contact surface is achieved, and potential angular errors are compensated for.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.