Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5507911A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 14, 1995 |
| Grant date | Apr 16, 1996 |
| Priority date | — |
| Expiry date | Apr 14, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/978
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic, micromechanical vibrating string accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally colinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support, beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction colinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer with high aspect ratio tension relief and mass support beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.