Scanning probe type microscope apparatus
US5508517A · kind A · utility
31Cited by
9References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 5, 1995 |
| Grant date | Apr 16, 1996 |
| Priority date | — |
| Expiry date | Jun 5, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/869
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.