Method for the manufacture of IC-processed micro electro-static motors
US5510299A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1994 |
| Grant date | Apr 23, 1996 |
| Priority date | — |
| Expiry date | Jun 3, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a micro electro-static motor which is provided with a curved bearing structure for rotatably supporting the rotor of the micro electro-static motor in a line contact manner in order to reduce the frictional torque of the micromotor. The micro electro-static motor is also provided with four on-chip rotational speed detection devices to facilitate its rotational speed measurement and the closed-loop control of the rotational speed. The on-chip rotational speed detection devices are accomplished by forming four P-N junctions in a silicon substrate. The curved bearing structure can be accomplished by etching of a phosphosilicate glass/silicon oxide composite sacrificial layer to form a curved bearing opening due to the large difference of etch rates between the phosphosilicate glass and the silicon oxide in buffered HF and by forming a curved bearing in the curved bearing opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.