PFPE coatings for micro-mechanical devices
US5512374A · kind A · utility
120Cited by
6References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 1994 |
| Grant date | Apr 30, 1996 |
| Priority date | — |
| Expiry date | May 9, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31699
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and which thereafter stick or adhere. A perfluoropolyether (PFPE) film (31) is applied to the contacting or engaging portions of the elements (11,17) to ameliorate or eliminate such sticking or adhesion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.