Device for measuring the thickness of thin films
US5517312A · kind A · utility
112Cited by
20References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 1, 1994 |
| Grant date | May 14, 1996 |
| Priority date | — |
| Expiry date | Apr 1, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thin film thickness measuring device is disclosed. The device includes an illuminator, a receiver and a beam deflector. The illuminator provides a collimated input light beam along an input axis. The receiver includes a lens and a diaphragm having a pinhole located at a focal point of the lens and receives a collimated output light beam along an output axis parallel to the input axis. The beam deflector is translatable at least along a scanning axis parallel to the input axis. The beam deflector directs the input light beam towards a sample and the output light beam from the sample towards the receiver.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.