Polycrystalline ferroelectric capacitor heterostructure employing hybrid electrodes
US5519235A · kind A · utility
105Cited by
4References
13Claims
0Family size
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Key dates
| Filing date | Nov 18, 1994 |
| Grant date | May 21, 1996 |
| Priority date | — |
| Expiry date | Nov 18, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/682
Abstract
Ferroelectric capacitor heterostructures exhibiting exceptional reliability and resistance to fatigue and imprinting comprise hybrid electrodes of highly conductive platinum with polycrystalline metallic oxide and ferroelectric materials deposited on Si-CMOS-compatible substrates without the requirement for interposed crystallographic orientation templates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.