Electroplating workpiece fixture

US5522975A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Panayotis Andricacos · Ossining, US
• Kirk G. Berridge · Fishkill, US
• John O. Dukovic · Pleasantville, US
• Helmut R. Poweleit · Highland, US
• Jeffrey S. Richter · Kernersville, US
• Lubomyr T. Romankiw · Briarcliff Manor, US
• Otto P. Schick · Poughquag, US

Key dates

• Filing date: May 16, 1995
• Grant date: Jun 4, 1996
• Expiry date: May 16, 2015

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D17/06
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A fixture for supporting a workpiece in a processing cell includes a frame and cooperating workpiece holder. The frame includes a head having a hole therein which receives an integral plateau of the holder. The holder plateau includes an annular seal adjacent a perimeter thereof with a vacuum port disposed therein. The workpiece rests on the seal so that vacuum drawn in the vacuum port fixedly holds the workpiece against the plateau. Assembly of the holder plateau and workpiece thereon through the frame-head hole positions the workpiece coplanar with a front side of the frame. In exemplary embodiments, independent electrical current paths are provided to the workpiece and a surrounding auxiliary electrode.