Scanning electron microscope and image forming method therewith
US5523567A · kind A · utility
13Cited by
5References
8Claims
0Family size
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Key dates
| Filing date | Oct 28, 1994 |
| Grant date | Jun 4, 1996 |
| Priority date | — |
| Expiry date | Oct 28, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2803
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an electron microscope for observing an image of a sample using secondary electrons emitted from the sample by two-dimensionally scanning an electron beam on the sample, a low magnification and wide view image of the sample is formed on one frame memory. The frame memory for storing on picture of the image is divided into an appropriate number of areas. The image data of the sample, obtained by consecutively moving the sample to the sample areas, is stored to the corresponding areas of the frame memory.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.