Hitachi Science Systems Ltd.
37Patents
6Active
37Granted
36Portfolio score
Filing activity: Aug 27, 1992 → Oct 12, 2007 · 6 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6495838B1 | Sample heating holder, method of observing a sample and charged particle beam apparatus | Electricity | 32 | Expired |
| US6713761B2 | Scanning electron microscope | Electricity | 14 | Expired |
| US7727469B2 | Automatic analyzer | Emerging Cross-Sectional Technologies | 13 | Active |
| US5523567A | Scanning electron microscope and image forming method therewith | Electricity | 13 | Expired |
| US7294833B2 | Method of alignment for efficient defect review | Electricity | 9 | Expired |
| US6920703B2 | Microstructure drying treatment method and its apparatus and its high pressure vessel | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6897445B2 | Scanning electron microscope | Electricity | 7 | Expired |
| US7053371B2 | Scanning electron microscope with measurement function | Electricity | 6 | Expired |
| US5591980A | Bi-axial-tilting specimen fine motion device and method of correcting image shifting | Electricity | 6 | Expired |
| US6963067B2 | Scanning electron microscope and sample observing method using it | Electricity | 6 | Expired |
| US6992286B2 | Material characterization system | Electricity | 5 | Expired |
| US7009178B2 | Scanning electron microscope | Electricity | 5 | Expired |
| US6949752B2 | Electron beam apparatus and high-voltage discharge prevention method | Electricity | 5 | Expired |
| US7511271B2 | Scanning electron microscope | Electricity | 5 | Active |
| US6875983B2 | Electron microscope and means to set observation conditions | Electricity | 4 | Expired |
| US6657193B2 | Scanning electron microscope | Electricity | 4 | Expired |
| US7033089B2 | Method of developing a resist film and a resist development processor | Physics | 4 | Expired |
| US7154089B2 | Scanning electron microscope | Electricity | 3 | Expired |
| US7364698B2 | Automatic analyzer | Physics | 3 | Expired |
| US7995833B2 | Method of alignment for efficient defect review | Electricity | 3 | Active |
| US7214938B2 | Sample observation method and transmission electron microscope | Electricity | 2 | Expired |
| US7547414B2 | Automatic analyzer | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7081625B2 | Charged particle beam apparatus | Electricity | 2 | Expired |
| US7169357B2 | Automatic chemical analyzer | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7163379B2 | Gradient liquid feed pump system, and liquid chromatograph | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.