Patent assignee · JP · COMPANY

Hitachi Science Systems Ltd.

37Patents
6Active
37Granted
36Portfolio score

Filing activity: Aug 27, 1992 → Oct 12, 2007 · 6 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6495838B1 Sample heating holder, method of observing a sample and charged particle beam apparatus Electricity 32 Expired
US6713761B2 Scanning electron microscope Electricity 14 Expired
US7727469B2 Automatic analyzer Emerging Cross-Sectional Technologies 13 Active
US5523567A Scanning electron microscope and image forming method therewith Electricity 13 Expired
US7294833B2 Method of alignment for efficient defect review Electricity 9 Expired
US6920703B2 Microstructure drying treatment method and its apparatus and its high pressure vessel Emerging Cross-Sectional Technologies 8 Expired
US6897445B2 Scanning electron microscope Electricity 7 Expired
US7053371B2 Scanning electron microscope with measurement function Electricity 6 Expired
US5591980A Bi-axial-tilting specimen fine motion device and method of correcting image shifting Electricity 6 Expired
US6963067B2 Scanning electron microscope and sample observing method using it Electricity 6 Expired
US6992286B2 Material characterization system Electricity 5 Expired
US7009178B2 Scanning electron microscope Electricity 5 Expired
US6949752B2 Electron beam apparatus and high-voltage discharge prevention method Electricity 5 Expired
US7511271B2 Scanning electron microscope Electricity 5 Active
US6875983B2 Electron microscope and means to set observation conditions Electricity 4 Expired
US6657193B2 Scanning electron microscope Electricity 4 Expired
US7033089B2 Method of developing a resist film and a resist development processor Physics 4 Expired
US7154089B2 Scanning electron microscope Electricity 3 Expired
US7364698B2 Automatic analyzer Physics 3 Expired
US7995833B2 Method of alignment for efficient defect review Electricity 3 Active
US7214938B2 Sample observation method and transmission electron microscope Electricity 2 Expired
US7547414B2 Automatic analyzer Emerging Cross-Sectional Technologies 2 Expired
US7081625B2 Charged particle beam apparatus Electricity 2 Expired
US7169357B2 Automatic chemical analyzer Emerging Cross-Sectional Technologies 2 Expired
US7163379B2 Gradient liquid feed pump system, and liquid chromatograph Physics 2 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.