Position detecting system
US5523843A · kind A · utility
183Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 1993 |
| Grant date | Jun 4, 1996 |
| Priority date | — |
| Expiry date | Sep 9, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for detecting yawing of an article movable in first and second orthogonal directions along a plane includes a first yawing detecting device for detecting any angular change of a first surface of the article opposed to the first yawing detecting device, during movement of the article in the first direction; and a second yawing detecting device for detecting any angular change of a second surface of the article different from the first surface and opposed to the second yawing detecting device, during movement of the article in the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.