Yukio Yamane
19Patents
11h-index
21Co-inventors
72Inventor score
Filing activity: Jun 27, 1974 → Jul 21, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5523843A | Position detecting system | Physics | 183 | Expired |
| US5102188A | Vehicle body structure producing method and flowable resin damming arrangement therefor | Performing Operations; Transporting | 82 | Expired |
| US5858587A | Positioning system and method and apparatus for device manufacture | Mechanical Engineering; Lighting; Heating | 57 | Expired |
| US6252648A | Exposure apparatus and method of cleaning optical element of the same | Physics | 45 | Expired |
| US3968183A | Film excellent in slip characteristics and its production | Performing Operations; Transporting | 31 | Expired |
| US4869481A | Plate-like article holding device | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5440397A | Apparatus and method for exposure | Physics | 24 | Expired |
| US4434593A | Window structure of a vehicle body | Performing Operations; Transporting | 22 | Expired |
| US6151100A | Positioning system | Physics | 15 | Expired |
| US4070417A | Stretched polyester film from a polymer blend | Performing Operations; Transporting | 13 | Expired |
| US4405174A | Window structure of a vehicle body | Performing Operations; Transporting | 13 | Expired |
| US4261610A | Molding assembly | Performing Operations; Transporting | 11 | Expired |
| US5773953A | Substrate transfer system | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6259509A | Exposure apparatus and device manufacturing method | Physics | 9 | Expired |
| US6552774B2 | Exposure apparatus | Physics | 4 | Expired |
| US6590631B2 | Exposure apparatus and device manufacturing method using the same | Physics | 3 | Expired |
| US7119878B2 | Exposure apparatus and method of cleaning optical element of the same | Physics | 1 | Expired |
| US7061576B2 | Exposure apparatus and method of cleaning optical element of the same | Physics | 0 | Expired |
| US6762822B2 | Exposure apparatus and manufacturing method using the same | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.