Method for wafer scrubbing
US5529638A · kind A · utility
24Cited by
3References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 3, 1995 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | Mar 3, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67046
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wet indexer for receiving a cassette of wafers from a previous processing station that have not been allowed to dry. The wet indexer then keeps the wafers submersed in processing solution before and during indexed transmission to later cleaning stations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.