Probe card assembly
US5530371A · kind A · utility
69Cited by
12References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 1995 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | Apr 24, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07378
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A carousel for a probe card assembly which includes opposed planar rings supported and spaced apart by flexible supports. The flexible supports, while supporting the planar rings, also allow the planar rings to rotate with respect to each other. Also included are a plurality of connecting means which pass through perforations in the planar rings so as to thereby make interconnection between a probe card and an interface card in a semiconductor test system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.