Pulsed thermal flow sensor system
US5533412A · kind A · utility
69Cited by
16References
7Claims
0Family size
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Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Jul 9, 1996 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P5/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A precise fluid flow meter fabricated by micromachining techniques measures a wide range of fluid flow rates. Two serial portions of an enclosed channel have different cross-sectional areas, and therefore different flow velocities. The fluid carries the thermal pulse through the flow channel to two sensor elements spaced apart along the channel downstream from the heating element. The transit time of the thermal pulse between the two sensor elements measures the fluid flow velocity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.