Vertical electroetch tool nozzle and method
US5536388A · kind A · utility
20Cited by
14References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 1995 |
| Grant date | Jul 16, 1996 |
| Priority date | — |
| Expiry date | Jun 2, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25F7/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A nozzle is provided for use in electroetching a vertically oriented workpiece, comprising a housing having a top, sides, and bottom for creating a flow of etching solution on the workpiece, and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.