Scanning probe microscope having a cantilever used therein
US5537863A · kind A · utility
53Cited by
11References
59Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1994 |
| Grant date | Jul 23, 1996 |
| Priority date | — |
| Expiry date | Jul 15, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.