Process and device for adjusting the distance between a workpiece and a mask
US5543890A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 1994 |
| Grant date | Aug 6, 1996 |
| Priority date | — |
| Expiry date | Jul 8, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process and device for adjusting distance for purposes of parallel positioning of a workpiece relative to a mask at a preset distance in which production can be done easily and with low costs. A workpiece is held at a distance from a mask on a work-holding fixture and one of the work-holding fixture and a mask carrier carrying the mask is moved by a moving device toward the other to bring the workpiece comes into contact with the mask. After such contact has occurred, movement of the moving device is continued until a signal is transmitted to a system controller from each of at least three alignment devices which are arranged on the work-holding fixture or the mask carrier, the alignment devices having calibration device which essentially begin to move beginning at a time at which the workpiece and mask come into contact with one another and can no longer execute any further relative movement. Movement of the work-holding fixture or the mask carrier is stopped when the system controller receives a signal from all of the calibration devices, which thus is assessed as achievement of a parallel alignment of the workpiece and mask relative to one another, at which time the displaceme…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.