Probe card assembly having a ceramic probe card
US5546012A · kind A · utility
64Cited by
12References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 15, 1994 |
| Grant date | Aug 13, 1996 |
| Priority date | — |
| Expiry date | Apr 15, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07378
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a probe card assembly which includes an interface card having a plurality of contact pads on at least one surface thereof, a probe card having a plurality of contact pads on at least one surface thereof, and a carousel interposed between the interface card and the probe card having a plurality of connecting means for making contact between the interface card contact pads and probe card contact pads. Also disclosed are the probe card.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.