Wet processing apparatus having individual reactivating feedback paths for anode and cathode water
US5549798A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 1995 |
| Grant date | Aug 27, 1996 |
| Priority date | — |
| Expiry date | Mar 24, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2301/066
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
In a wet processing apparatus, an electrolytic cell, a first storing cell for storing anode active water of the electrolytic cell, a first processing cell for processing a target with the anode active water of the first storing cell, a second storing cell for storing cathode active water of the electrolytic cell, and a second processing cell for processing a target with the cathode active water of the second storing cell are provided. Also, a first reactivating feedback path is provided between the first processing cell and an anode region of the electrolytic cell, and a second reactivating feedback path is provided between the second processing cell and a cathode region of the electrolytic cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.