Method and apparatus for resetting individual processes in a control system
US5555177A · kind A · utility
21Cited by
7References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 27, 1994 |
| Grant date | Sep 10, 1996 |
| Priority date | — |
| Expiry date | May 27, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus for resetting a process in a control system. The steps in this method involve identifying a process for a portion of a double-sided wafer scrubber. Then, the process is reset.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.