Method and apparatus for detecting the temperature of a sample
US5556204A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 1994 |
| Grant date | Sep 17, 1996 |
| Priority date | — |
| Expiry date | May 19, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to a vacuum processing method and apparatus. When a sample is plasma processed under a reduced pressure, a sample bed is cooled by a cooling medium kept at a predetermined temperature lower than an etching temperature, the sample is held on the sample bed, a heat transfer gas is supplied between the back of the sample and the sample installation surface of the sample bed, and the pressure of the heat transfer gas is controlled so as to bring the sample to a predetermined processing temperature. In this way, a sample temperature can be regulated rapidly without increasing the scale of the apparatus. The temperature of the sample can be detected by a detector including a movable optical fiber having one end at which a phosphor is mounted and another end for transferring the fluorescence from the phosphor, a fixed optical transfer member provided apart from the another end of the movable optical fiber for receiving the fluorescence, a detector for detecting the temperature based on the fluorescence received by the fixed optical transfer member, and an actuating member for moving the movable optical fiber to provide thermal contact between the sample and the phos…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.