Microwave plasma reactor
US5556475A · kind A · utility
32Cited by
16References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 1993 |
| Grant date | Sep 17, 1996 |
| Priority date | — |
| Expiry date | Jun 4, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32192
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microwave plasma reactor including a chamber for containing a gas to be energized into a plasma with microwave energy, an electrode having two surfaces in the chamber for radiating microwave energy from one of the surfaces into the chamber to form the plasma proximate the radiating surface, and a waveguide or coaxial conductor for introducing microwave energy onto the other of the two electrode surfaces for providing the energy to form the plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.