Method for aligning a semiconductor device
US5556808A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 30, 1994 |
| Grant date | Sep 17, 1996 |
| Priority date | — |
| Expiry date | Jun 30, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/975
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method for aligning a semiconductor device (10) to a fixture (11) is provided. A first physical alignment feature (12) on the semiconductor device (10) and a second physical alignment (24) on the fixture (11) mate to align and hold the semiconductor device (10) in place. In one embodiment the physical alignment features (12) and (24) are produced using standard photolithography techniques, resulting in precise alignment features. In another embodiment the physical alignment features (12) and (24) are designed and placed to control the direction the thermal expansion of the semiconductor device (10) relative to the fixture (11).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.