Micro-actuator
US5563466A · kind A · utility
Inventors
Key dates
| Filing date | Jun 7, 1993 |
| Grant date | Oct 8, 1996 |
| Priority date | — |
| Expiry date | Jun 7, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention incorporates micro-machining fabrication techniques to achieve practical electrostatic actuation forces over a length change of the order of 20 to 50 percent. It constitutes an improvement over the prior art by virtue of array designs which yield a more versatile and stronger actuator. One basic design utilizes diamond-shaped attractive elements to transmit transverse forces for longitudinal, two-way actuation. Another basic design features interlocking, longitudinally attractive elements to achieve longitudinal, two-way actuation. Other improvements include means for locking the actuator at an arbitrary displacement as well as means for amplification of either the actuation force or length change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.