Fluid-cooled dielectric window for a plasma system
US5568015A · kind A · utility
16Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 1995 |
| Grant date | Oct 22, 1996 |
| Priority date | — |
| Expiry date | Feb 16, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/28
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fluid-cooled dielectric window for a microwave plasma system which uses microwave absorbing fluids is described. The window includes a dielectric window and a cooling member in contact with an outer surface of the window which defines a channel and a medium adjacent to the channel. The channel transports a microwave absorbing cooling fluid over the outer surface of the window. The medium allows an electric field to enter through the window and sustain a plasma in a chamber while the fluid is flowing through the channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.