Acceleration sensor
US5574222A · kind A · utility
43Cited by
4References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 4, 1995 |
| Grant date | Nov 12, 1996 |
| Priority date | — |
| Expiry date | Aug 4, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an acceleration sensor having a multiplicity of movable electrodes, a first group of fixed electrodes is arranged on one side of the movable electrodes and a second group of fixed electrodes is arranged on the other side of the movable electrodes. The fixed electrodes of the first group are suspended from a connecting beam and are connected in parallel electrically by the latter. The fixed electrodes of the second group are anchored individually on the substrate and are connected in parallel electrically by means of a connecting conductor track.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.