Dual-beam interferometer with a phase grating
US5574560A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1995 |
| Grant date | Nov 12, 1996 |
| Priority date | — |
| Expiry date | Feb 24, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometer having a light source that generates a beam of light. The beam of light is directed to a beam splitter where it is split into a reference beam and a measuring beam. A pair of reflectors reflect the reference and measuring beams towards an interference point. A beam merging element is positioned at the interference point so that the reference and measuring beams interfere with each other at the interference point so that at least two pairs of partial beams which are phase-shifted in relation to each other and interfere with one another are generated. The two pairs of partial beams are received by a plurality of detectors which form directionally dependent measured values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.