Spatial light modulator
US5579151A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 17, 1995 |
| Grant date | Nov 26, 1996 |
| Priority date | — |
| Expiry date | Feb 17, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator includes a reflector which is electrostatically deflectable out of a normal position, whereat a supporting beam is unstressed, into a deflected position, whereat a portion of the mirror contacts a portion of a landing electrode at the same electrical potential as the reflector. An inorganic layer or solid lubricant is deposited on the contacting portions. After the modulator is operated for a period of time, the tendency of the reflector to stick or adhere to the landing electrode is diminished or eliminated by the layer so that the reflector is returned to its normal position without any reset signal or with a reset signal having a reasonably low value. Preferred materials for the layer are SiC, AlN or SiO.sub.2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.