Optical element, production method of optical element, optical system, and optical apparatus
US5581605A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1995 |
| Grant date | Dec 3, 1996 |
| Priority date | — |
| Expiry date | Mar 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/067
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical element for X-ray reflection according to the present invention is provided with a number of fine convex surfaces or concave surfaces regularly arranged on a substrate. Multilayer films reflecting X-rays are formed over the convex surfaces or concave surfaces. The convex surfaces or concave surfaces have such a shape that when X-rays enter each concave surface or convex surface, they are reflected with a certain diverging angle by the multilayer films and as a result that a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a certain distance apart from the concave surfaces or convex surfaces. By this, a number of secondary X-ray sources are formed to enable uniform irradiation of X-rays in a wide region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.