Cryopump
US5582017A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 26, 1995 |
| Grant date | Dec 10, 1996 |
| Priority date | — |
| Expiry date | Apr 26, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump is provided with a detecting means for detecting an operation parameter at an elapsed operation time in a current operation cycle of the cryopump, a storing means for storing a value of another operation parameter in a past operation cycle of the cryopump as a management parameter, an arithmetic controlling means for calculating a succeeding rotational speed of the expander motor based on the current operational parameter and the management parameter stored in the storing means and outputting the same as a driving instruction signal, with which the succeeding rotational speed of the expander motor is controlled so as to maintain a temperature of a cryopanel or a pressure in a vacuum chamber to which the cryopump is attached at a predetermined value by using the operation parameter at the elapsed operation time in the current operation cycle of the cryopump detected by the detecting means and the operation parameter at the corresponding elapsed operation time in the past operation cycle of the cryopump stored in the storing means as the management parameter, and an expander motor driving means for driving the expander motor according to the driving instruction signal outp…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.