Process method and apparatus using focused ion beam generating means
US5583344A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1996 |
| Grant date | Dec 10, 1996 |
| Priority date | — |
| Expiry date | Feb 9, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A processing method and a processing apparatus realizing the method use a focused ion beam generator. The apparatus includes a plasma or liquid metal ion source producing ions not influencing electric characteristics of a sample, an ion beam generator for extracting ions from the ion source into an ion beam, an ion beam focusing device for focusing the ion beam, an irradiator for irradiating the focused ion beam onto the sample, and a sample chamber in which the sample to be irradiated for processing is installed. The focused ion beam is irradiated onto a sample such as a silicon wafer or device to conduct on a particular position of the sample a fine machining work, a fine layer accumulation, and an analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.