System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools
US5591299A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1995 |
| Grant date | Jan 7, 1997 |
| Priority date | — |
| Expiry date | Apr 28, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Method and apparatus for providing integrated monitoring, control and diagnostics functions for semiconductor spray processors is disclosed. In a preferred embodiment, a spray processor host system of the present invention comprises a plurality of PC-class computers interconnected via a network link. Each of a first subset of the spray processor host system computers comprises a supervisor computer connected to one of a plurality of spray process tools, which in the preferred embodiment comprise Mercury.RTM. MP processors. The supervisor computers provide ongoing information exchange with the processors and maintain up-to-date status information. Each supervisor computer maintains an event log of processor operations and operator actions, as well as data capture files for storing process variables captured by the supervisor computer. Each of a second subset of the spray processor host system computers comprises an engineer computer for providing the system operator with a command driven interface to the spray processor host system. Each engineer computer can monitor a plurality of supervisor computers and is used to enable such functions as recipe directory editing, recipe download…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.