Bi-axial-tilting specimen fine motion device and method of correcting image shifting
US5591980A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 20, 1995 |
| Grant date | Jan 7, 1997 |
| Priority date | — |
| Expiry date | Jun 20, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein EQU .DELTA.y=y(1-cos .theta..sub.y2 /cos .theta..sub.y1) EQU .DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.