Patent · US Expired

Automated surface acquisition for a confocal microscope

US5594235A · kind A · utility

67Cited by
4References
10Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 7, 1995
Grant dateJan 14, 1997
Priority date
Expiry dateJun 7, 2015

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/244
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method is described for obtaining an image of a target surface with a confocal microscope. The surface to be imaged is represented by a number of points on the surface, each of which has a unique location represented by X, Y, and Z Cartesian coordinates. The microscope selects a starting position for an objective lens of the microscope along a Z vector substantially normal to the surface. The objective lens has a preselected range of travel along the Z vector that is divided into a number of Z positions. Next, the objective lens is positioned and the surface scanned at each of the Z positions. The scan at each Z position provides signals, one for each point on the surface, representing the reflected intensity of laser light. Then, for each point on the surface, the microscope finds the Z coordinate of the point by determining which Z position resulted in the greatest return intensity of reflected laser light. From this information the Z coordinate of any particular point may be determined because the maximum reflected intensity for a given point, when correlated to the Z position of the objective lens, gives the Z location of that point on the surface. Having determined the Z loc…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.