Shower head and film forming apparatus using the same
US5595606A · kind A · utility
858Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1996 |
| Grant date | Jan 21, 1997 |
| Priority date | — |
| Expiry date | Apr 18, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45572
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A shower head of a metal CVD apparatus has a raw gas passage and a reduction gas passage for independently and respectively supplying a raw gas and a reduction gas into a process chamber. The shower head includes upper, middle and lower blocks which are formed independently of each other. Each of the raw gas passage and the reduction gas passage is branched from the upper block to the lower block. A coolant passage is formed in the lower block near supply outlets of the raw gas and the reduction gas for cooling the supply outlets. A heater is arranged in the upper and middle blocks for heating the raw gas passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.