Silicon chip for use in a force-detection sensor

US5600074A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Jiri Marek · Reutlingen, DE
• Frank Bantien · Ditzingen, DE
• Steffen Schmidt · Dresden, DE
• Kurt Weiblen · Metzingen, DE
• Matthias Kuesell · Kornwestheim, DE
• Werner Herden · Gerlingen, DE

Key dates

• Filing date: May 10, 1994
• Grant date: Feb 4, 1997
• Expiry date: May 10, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S73/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A force sensor employing a silicon chip having a force application area on a top surface and attached to a support at a bottom surface. Piezoresistive elements are arranged on the silicon chip in areas of high mechanical tension and produce signals. Circuits, which receive the signals produced by the piezoresistive elements, are arranged on the silicon chip in areas of low mechanical tension. The areas of mechanical tension may be influenced by providing grooves and/or recesses in the bottom surface of the silicon chip and by providing grooves in the top surface of the silicon chip.